| 摘要 |
PROBLEM TO BE SOLVED: To provide a pipe joint, a fluid controller, a fluid controlling device, and a semiconductor manufacturing device with high productivity and reliability, by preventing metallic plating film fouling on a screw portion, while improving the workability of welding scale removal work.SOLUTION: A pipe joint (4) includes a first pipe member (8); a female nut (12); and thrust receiving members (28, 30, 32, and 34). A first flange portion (16) has an outer diameter (D1) which is smaller than an inner diameter (D2) of an inner flange portion (22). The thrust receiving member has an outer diameter (D3) which is larger than the inner diameter (D2) of the inner flange portion (22), an inner diameter (D4) which is smaller than the outer diameter (D1) of the first flange portion (16), and inner peripheral surfaces (28c, 30c, 32a, and 34c) which regulate the inner diameter (D4) of the thrust receiving member, accept the installation of the thrust receiving member to the first pipe member, and are opened or can be opened.SELECTED DRAWING: Figure 2 |
