发明名称 System for vacuum-thermal material treatment has lifting device that moves material and transport chamber(s) between treatment chambers in series with valved upper charging openings
摘要 The system has at least one heatable treatment chamber (3,3.2-3.5) with an upper closable charging opening (5) and a heater, a vacuum pump and a condenser for the vapor drawn off. The treatment chamber is arranged in series with at least one further treatment chamber with an upper charging opening with valve (6) and heat exchanger. At least one horizontally movable transport chamber (29,29.2) open at the bottom is arranged above the treatment chambers to accommodate the material over its full height and can be connected to the treatment chambers in a gas-tight aligned manner. A lifting arrangement (27) moves the material with the transport chamber from one treatment chamber to another.
申请公布号 DE19909441(C1) 申请公布日期 2000.07.20
申请号 DE19991009441 申请日期 1999.03.04
申请人 ALD VACUUM TECHNOLOGIES AG 发明人 MELBER, ALBRECHT;BRUCKAMP, JOERG;WANETZKY, ERWIN;MOLITOR, GEORG
分类号 B01D1/00;B08B7/00;B09B3/00;B09C1/06;F27D7/06;F27D9/00;F27D11/02;F27D11/06;(IPC1-7):A62D3/00 主分类号 B01D1/00
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