发明名称 SEMICONDUCTOR WAFER
摘要 PROBLEM TO BE SOLVED: To obtain a wafer in which test accuracy can be enhanced by suppressing the difference of I/O response during test time and during normal operation. SOLUTION: Since a test signal output line 31 connected in parallel with a corresponding normal signal output line 26 and outputting a test signal processed through a flash memory 21 to a dedicated pad 5 through an inverter 32 is provided, the test signal is outputted to the dedicated pad 5 and a normal pad 4 through an arrangement having identical characteristics during test time and during normal operation. Since no difference appears in I/O response during test time and during normal operation, test can be carried out accurately.
申请公布号 JP2000232136(A) 申请公布日期 2000.08.22
申请号 JP19990033044 申请日期 1999.02.10
申请人 MITSUBISHI ELECTRIC CORP 发明人 UMEZAKI TAKAHIRO
分类号 H01L21/822;G01R31/28;H01L21/66;H01L27/04;(IPC1-7):H01L21/66 主分类号 H01L21/822
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