| 摘要 |
PROBLEM TO BE SOLVED: To excellently separate components from a gas containing dichlorosilane and methylchlorosilane and to accurately determine the concentrations of the components. SOLUTION: A mixed gas of dichlorosilane and methylchlorosilane in which trichlorosilane exists is passed through a column charged with a filler, on which dimethylsilicone is supported, with a carrier gas under conditions of a retention time of trichlorosilane of >=13 minutes to separate dichlorosilane and methylchlorosilane. The method for analyzing the mixed gas of a silane comprises separating dichlorosilane and methylchlorosilane by the separation method of a mixed gas of silanes and determining the concentration of at least one compound.
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