发明名称 MANUFACTURE OF CARBON HAVING MANY KINDS OF FUNCTIONS AS SEMICONDUCTOR
摘要 PROBLEM TO BE SOLVED: To provide carbon with many kinds of functions by a method wherein an organic polymer precursor is heat-treated at a high temperature to obtain the carbon and a group II, III, IV, V or VI element in the peridic table other than carbon as an element is contained in the carbon. SOLUTION: An organic polymer percursor is heat-treated at a high temperature to obtain carbon, and a heteroelement as a group II, III, IV, V or VI element in the periodic table other than carbon as an element is contained in the carbon. Preferably, a carbon film which is obtained by heating the organic polymer precursor at a high temperature is treated so as to make its purity high, and the heteroelement is then introduced so as to be contained. As a method for introducing the heteroelement, a method in which the carbon is doped with the heteroelement other than the carbon as the element by an ion implantation method, a diffusion method or the like is enumerated. The carbon film which is obtained in this manner is excellent in its mechanical strength as different from ordinary homogeneous glasslike carbon.
申请公布号 JP2000269159(A) 申请公布日期 2000.09.29
申请号 JP19990075629 申请日期 1999.03.19
申请人 UBE IND LTD 发明人 DOYAMA MASAO;YAMADA YOSHIHIKO
分类号 H01L21/265;C01B31/02;H01L21/04;(IPC1-7):H01L21/265 主分类号 H01L21/265
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