| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus capable of efficiently eliminating floating residues in vacuum with simple facilities. SOLUTION: This charged particle beam apparatus has a pulse tube refrigerator 11, a refrigerator control part 13 for controlling the refrigerator 11, a compressor 14, a high pressure rotary bulb 15, a low pressure rotary bulb 16, and an active dumper 17 for eliminating the vibration in the refrigerator 11. A cooling part 10 is placed between an object lens 6 and a sample 8 in a vacuum vessel 2 so that residues in the vacuum vessel 2 are adsorbed by the cooling part 10. Thereby, the quantity of the residues in the vacuum vessel 2 can be reduced and an error in length measuring SEM is reduced to improve the measurement accuracy. Since a pulse tube is used as the refrigerator 11 for cooling the cooling part 10, the structure can be simplified and miniaturized, at the same time, vibration can be restrained. Therefore, the measurement precision is improved, the maintenance is easy, and the running cost is reduced.
|
