Planar vibratory gyroscopes

摘要

Planar vibratory gyroscope structures are provided which are inherently symmetric, which facilitate the use of simple monolithic fabrication processes and which enable the use of sensitive control and sense systems. A planar vibratory member (22) of these structures has a hollow frame (26), a plate (28) that has a plate perimeter (30) and is positioned within the frame (26) and a plurality of elongate beams (32) which couple the plate (28) to the frame (26) wherein each of the beams (32) is proximate to and substantially parallel to a respective portion (30A) of the plate perimeter (30). The exterior rim (34) of the planar member (22) can be supported by a substrate (24) which provides room for easy access to the plate (22) with mode control and sense systems (40, 42).