| 摘要 |
<p>Transfer arms (10) for the automated handling of semiconductor wafers have a single vacuum passageway (32) communicating with a wafer-contacting vacuum opening (28). The transfer arms may have an optional U-shaped wafer-engaging end (122, 124) with a part circular vacuum opening for acquiring the wafer. The transfer arms may be single-sided or double-sided, each side being capable of acquiring, moving and selectively releasing a wafer on demand.</p> |
