发明名称 Elektrisches Halbleiterbauelement
摘要 An electric semiconductor element comprising a monocrystalline semiconductor substrate which is made, for example, out of silicon; an insulating layer (6) which is penetrated by a contact hole (30) on at least one point and arranged on the surface of the semiconductor substrate (1); in addition to a contact element which comes into contact with the semiconductor substrate (1) by means of the contact hole (30) and which is made of a material such as aluminium, whereby the semiconductor material of the substrate can be dissolved in an anisotropic process. The edges of the contact hole (30) are configured as diffusion-preventing structures.
申请公布号 DE19930797(A1) 申请公布日期 2001.01.04
申请号 DE19991030797 申请日期 1999.07.03
申请人 ROBERT BOSCH GMBH 发明人 GOERLACH, ALFRED;GEBHARD, MARION
分类号 H01L21/28;H01L21/768;H01L29/04;(IPC1-7):H01L21/28 主分类号 H01L21/28
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