| 摘要 |
PROBLEM TO BE SOLVED: To uniformly heat a whole pressure barrier part, to precisely control the temperature, and to implement the heating to the specified value in a short time by respectively providing a heating means and a temperature measuring means on both sides across the pressure barrier part, and independently controlling the temperature of each heating means based on the temperature obtained by the temperature measuring means. SOLUTION: The temperature of a heater H to heat a peripheral wall of an evaporation chamber 2 and a laminate disk 4 which is a pressure barrier part based on the measured temperature of the peripheral wall of an evaporator 1 and a thermocouple S inserted in a center part of a main body, and the temperature of a heater to heat the laminate disk 4 from an anvil 5 side is controlled based on the measured temperature of the thermocouple S inserted in the anvil 5. The laminate disk 4 and its periphery can be uniformly heated to the optimum evaporation temperature thereby to prevent the pyrolysis of a raw material at a high-temperature part due to the fluctuation of the temperature and the re-solidification of the raw material at a low- temperature part. Since the raw solution is evaporated and fed in a stable condition, the feed of the raw material can be kept stable, and a thin film of high quality can be formed with excellent reproducibility.
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