| 摘要 |
PROBLEM TO BE SOLVED: To provide a co-axial vacuum arc vapor deposition source capable of forming a thin film of high quality. SOLUTION: A cylindrical magnet 31 is disposed on the outside periphery of an anode 30 of a co-axial vacuum arc vapor deposition source 5. Electrons leaked through the opening of the anode 30 wind around the lines of magnetic force formed by the magnet 31 to form electron clouds. Because the fine particles of a vapor deposition material have positive charges, they are attracted to the electron clouds and reach, in a state collected by the lines of magnetic force, the surface of a substrate 22 to grow a thin film. No coarse particles are collected and mixed into the thin film because of their large mass as compared with their electric charge.
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