| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element realizing at least one of improvement of piezoelectric characteristics and suppression of a leakage current, and a piezoelectric element application device.SOLUTION: A piezoelectric element 300 comprises: a first electrode 60; a piezoelectric layer 70 being formed on the first electrode 60 by a solution method, and composed of a complex oxide having a perovskite structure and containing potassium, sodium and niobium; and a second electrode 80 provided on the piezoelectric layer 70. When a cross-sectional SEM image of the piezoelectric layer 70 is imaged with a 100,000 magnification ratio and evaluation is performed under conditions where a measurement value in a transverse direction is 1273 nm, two voids 75 or more included in the piezoelectric layer 70, a difference between a maximum value and a minimum value of diameters out of diameters of the individual voids having maximum diameters in a film thickness direction is equal to 14 nm or less, and the maximum value is equal to 24 nm or less.SELECTED DRAWING: Figure 4 |
