发明名称 METHOD FOR FORMING SEMICONDUCTOR DEVICES ON SEMICONDUCTOR WAFERS
摘要 PROBLEM TO BE SOLVED: To provide a method of forming a plurality of semiconductor devices on a plurality of semiconductor wafers.SOLUTION: The method includes forming a conductive layer on a surface of a first semiconductor wafer to create a Schottky contact between the conductive layer formed on the first semiconductor wafer and the first semiconductor wafer. A material composition of the conductive layer formed on the first semiconductor wafer is selected on the basis of the value of the physical property of the first semiconductor wafer. The method further includes forming a conductive layer on a surface of a second semiconductor wafer to create a Schottky contact between the conductive layer formed on the second semiconductor wafer and the second semiconductor wafer. A material composition of the conductive layer formed on the second semiconductor wafer is selected on the basis of the value of the physical property of the second semiconductor wafer. The material composition of the conductive layer formed on the second semiconductor wafer is different from the material composition of the conductive layer formed on the first semiconductor wafer.SELECTED DRAWING: Figure 1
申请公布号 JP2016225632(A) 申请公布日期 2016.12.28
申请号 JP20160111057 申请日期 2016.06.02
申请人 INFINEON TECHNOLOGIES AG 发明人 JOCHEN HILSENBECK;JENS PETER KONRATH
分类号 H01L21/285;H01L21/28;H01L21/329;H01L29/47;H01L29/872 主分类号 H01L21/285
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