| 摘要 |
PURPOSE: To provide a device capable of correcting distortion of the reflection surface of a mirror, and/or positional deviation caused by distortion, or the like, on the sample surface of drawing object, in multi-beam drawing.CONSTITUTION: A drawing device 100 includes a pixel division unit 50 for dividing the drawing region of a sample into a plurality of mesh-like pixel regions irradiated with a multi-charged particle beam, a pixel block generation unit 52 for grouping the plurality of pixel regions into a plurality of pixel blocks constituted by at least one pixel region, a correction unit 64 for correcting the positional deviation in units of pixel blocks, for each pixel block of the plurality of pixel blocks, an irradiation amount calculation unit 68 calculating the irradiation amount for each pixel subjected to correction of positional deviation, and a drawing unit 150 for patterning the sample by using the multi-charged particle beam, so that each pixel is irradiated with the calculated irradiation amount.SELECTED DRAWING: Figure 1 |
