METHOD OF FABRICATING CARBON-NANOTUBE FIELD EMITTER USING ELECTROPHORESIS

摘要

PURPOSE: A method of fabricating a carbon-nanotube field emitter using electrophoresis is provided which attaches carbon-nanotube as a tip for emitting electrons to reduce work function and driving voltage of the emitter and improve endurance to ionized gases generated during operation of the emitter. CONSTITUTION: A stripe-shaped cathode(12) is formed on a substrate(11), and an insulating layer(13) having a hole(13a) is formed on the cathode. A metal gate(14) having an opening(14a) corresponding to the hole is formed on the insulating layer, and a carbon-nanotube tip formed on the exposed surface of the cathode. The substrate on which the cathode is formed is placed in a container filled with carbon-nanotube powder solution, having a predetermined distance from an electrode plate. A predetermined bias voltage is applied to the electrode plate to attach the carbon-nanotube powder(25) to the exposed surface of the cathode through the hole of the insulating layer at the normal temperature. Then, the substrate to which the carbon-nanotube powder is attached is taken out of the container to be heat-processed at a predetermined temperature.