发明名称 OPTICAL MEMBER HOLDING DEVICE AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To provide an optical member holding device for improving the area accuracy of an optical member to be held, by reducing the deformation of the deadweight direction of the optical member without substantially increasing the costs. SOLUTION: This optical member holding device 70 is provided with an interposing member brought into contact with one face 51b of an optical member 51 and the other face 51a, for interposing the optical member 51. In this case, the interposing member is provided with a first member 82, having a contact face 94a to be brought into contact with one face 51b and a second member 81, having a contact surface 89a to be brought into contact with the other face 51a, and the contact face 94a of the first member 82 and the contact race 89a of the second member 81 are arranged so as to face each other, and the contact area with one face 51a and the contact area with the other face 51b are formed almost dentical.
申请公布号 JP2001076992(A) 申请公布日期 2001.03.23
申请号 JP19990246750 申请日期 1999.08.31
申请人 NIKON CORP 发明人 NISHIKAWA HITOSHI;ONDA MINORU
分类号 H01L21/027;G03F7/20;(IPC1-7):H01L21/027 主分类号 H01L21/027
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