| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment system where more suitable control conditions (recipe) for sequence control can be developed at a low cost, in a short term and heat treatment units. SOLUTION: A heat treatment system is provided with a plurality of heat treatment units, having heater plates 51 which heat boards W up to a prescribed temperature. At least one of the plurality of heating treatment units is a temperature measuring unit (M.HP) having a substrate 61 for temperature measurement, in which a plurality of temperature sensors 60 are attached and which is arranged so as to be mounted on the heater plate. The heat treatment system is also provided with a recording means 64 for recording outputs of the temperature sensors attached on the substrate 61 for temperature measurement.
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