| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer check device which is lessened in floor projected area and capable of naturally carrying out macro observations. SOLUTION: A wafer check device is equipped with a wafer transfer device 10 and a microscope 30 where a wafer 5 is loaded by the wafer transfer device 10 to make macro checks and micro checks on a wafer 5. A macro check position is set on the stage 40 of the microscope 30, and an illuminating lamp 31 is provided off to the upper right of the microscope 30 so as to make a macro check on the stage 40 of the microscope.
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