| 摘要 |
PROBLEM TO BE SOLVED: To ensure both excellent soft magnetic characteristics and excellent corrosion resistance and to reduce the film stress. SOLUTION: A very small amount of Cu is added to a soft magnetic thin film having a basic composition consisting of Fe, Si, Ta and N. Then the composition of the resulting soft magnetic thin film is represented by the formula FevSiwTaxCuyNz, the relations of 0.65<=v/(v+w+x+y)<=0.85, 0.1<=w/(v+w)<=0.3 and 0.02<=y/(v+w+x+y)<=0.05 are satisfied. Not more than 5 at.% Ru or Ga may further be added. By the addition of the very small amount of Cu, the film stress is reduced while retaining excellent soft magnetic characteristics and corrosion resistance.
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