,申请号JP19930118435-传众专利搜索

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发明名称
摘要
申请公布号	JP3158158(B2)	申请公布日期	2001.04.23
申请号	JP19930118435	申请日期	1993.05.20
申请人		发明人
分类号	C23F4/02;H01J37/06;H01J37/30;H01J37/32;H01J37/34;(IPC1-7):H01J37/06	主分类号	C23F4/02
代理机构		代理人
主权项
地址

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