Verfahren und Vorrichtung zur Herstellung von Solarzellen

摘要

The present invention relates to a method for producing a solar cell. Material is deposited on a multicrystalline silicon substrate. Passivation is carried out with hydrogen plasma. According to the invention, the material is deposited by means of low pressure CVD and the hydrogen passivation is carried out by supplying hydrogen plasma that is induced away from the partially processed solar cells. The invention also relates to a device for carrying out said method.