SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning electron microscope that may compensate for the sight disappearance caused by slanting of a specimen regardless of the thickness variance of the specimen and variant acceleration voltage. SOLUTION: The operator measures in advance a scrolling amount caused by tilting the specimen at a particular angle, of which measurement is used to precisely compensate for the sight disappearance caused by slanting of the specimen at the particular angle considering observation condition such as the acceleration voltage and WD.