| 摘要 |
PROBLEM TO BE SOLVED: To measure highly accurately regardless of the thickness of a measuring object. SOLUTION: This device is equipped with a laser type thickness meter composed by arranging two range finders 2a, 2b for measuring the distance from reflected light by irradiating a laser beam onto the surface of a plate-shaped measuring object 1 which is a target for thickness measurement, oppositely through the measuring object 1, for measuring the thickness of the measuring object 1 by detecting respective distances between each range finder 2a, 2b and the measuring object 1, a radiation thickness meter composed by arranging a radiation generator 6a for generating radiation and a radiation detector 6b for detecting the radiation, oppositely through the measuring object 1, for measuring the thickness of the measuring object 1 by irradiating the radiation from the radiation generator 6a to the measuring object 1 and by detecting a radiation quantity transmitted through the measuring object 1 by the radiation detector 6b, and a means for converting and outputting either of a thickness measured value by the laser type thickness meter and a thickness measured value by the radiation thickness meter as the final thickness measured value based on the thickness of the measuring object 1.
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