| 摘要 |
PROBLEM TO BE SOLVED: To provide a chamfering technique for a disc-like work capable of excellently finishing an outer peripheral edge of the disc-like work, even if a width direction center of the disc-like work and a width direction center of a grinding wheel groove of a grinding wheel are slightly shifted to each other. SOLUTION: When an outer peripheral edge of wafer W is chamfered by using the three annular grinding wheel grooves 6a, 6b, 6c (or 6d) for rough grinding to finishing grinding which are provided on an outer periphery of a single grinding wheel 2, the sectional forms of the grinding wheel grooves 6a, 6b, 6c (or 6d) to be used for each of three-stage grinding processes from a rough grinding process to a finishing grinding process are set so that the opening widths may be larger than at least the width of wafer W and a round- shaped radius of curvature at the bottom part may be gradually smaller as the radius goes from the grinding wheel groove 6a for rough grinding to the grinding wheel groove 6c (or 6d) for finishing grinding.
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