| 摘要 |
PROBLEM TO BE SOLVED: To improve the yield of a video display device constituted so that the layer of a micro optical device is layered on the layer of a micro actuator. SOLUTION: An actuator array layer 25 is manufactured on a semiconductor substrate 20 and an optical device array layer 65 is separately manufactured on a glass base plate 60. Thereafter, the non-defectives of the fine structural layers 25 and 65 are bonded each other so as to manufacture the video display device 50 where an optical device 3 is driven by an actuator 6. The respective layers 25 and 65 are manufactured in separate stages and the device 50 is manufactured of the non-defectives, so that the yield is improved.
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