发明名称 |
LOW SPEED POLYVALENT ION BEAM GENERATOR |
摘要 |
PROBLEM TO BE SOLVED: To generate efficiently a low velocity polyvalent ion beam controlled to a predetermined valency. SOLUTION: The apparatus comprises a polyvalent ion generation means for generating polyvalent ions, a trap control means for trapping only polyvalent ions of predetermined valency in the polyvalent ions generated by the polyvalent ion generation means and injecting the trapped polyvalent ions in a determined direction with a predetermined kinetic energy. The polyvalent ion generation means generates plasma using a high intensity laser to generate the low velocity polyvalent ions.
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申请公布号 |
JP2001210247(A) |
申请公布日期 |
2001.08.03 |
申请号 |
JP20000019487 |
申请日期 |
2000.01.28 |
申请人 |
INST OF PHYSICAL & CHEMICAL RES |
发明人 |
KUMAGAI HIROSHI;MIDORIKAWA KATSUMI;MATSUO YUKARI;KOBAYASHI TORU |
分类号 |
H01J27/24;B23K15/00;C23F4/00;H01J37/08;(IPC1-7):H01J27/24 |
主分类号 |
H01J27/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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