发明名称 LOW SPEED POLYVALENT ION BEAM GENERATOR
摘要 PROBLEM TO BE SOLVED: To generate efficiently a low velocity polyvalent ion beam controlled to a predetermined valency. SOLUTION: The apparatus comprises a polyvalent ion generation means for generating polyvalent ions, a trap control means for trapping only polyvalent ions of predetermined valency in the polyvalent ions generated by the polyvalent ion generation means and injecting the trapped polyvalent ions in a determined direction with a predetermined kinetic energy. The polyvalent ion generation means generates plasma using a high intensity laser to generate the low velocity polyvalent ions.
申请公布号 JP2001210247(A) 申请公布日期 2001.08.03
申请号 JP20000019487 申请日期 2000.01.28
申请人 INST OF PHYSICAL & CHEMICAL RES 发明人 KUMAGAI HIROSHI;MIDORIKAWA KATSUMI;MATSUO YUKARI;KOBAYASHI TORU
分类号 H01J27/24;B23K15/00;C23F4/00;H01J37/08;(IPC1-7):H01J27/24 主分类号 H01J27/24
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