Hermetically sealed absolute and differential pressure transducer

摘要

A single chip dielectrically isolated leadless pressure sensor adapted to substantially simultaneously measure a first pressure and a differential between the first pressure and a second pressure including: a wafer including first and second recessed portions respectively defining first and second deflectable diaphragms and at least one rim portion formed between the first and second recessed portions for isolating the first deflectable diaphragm from the second deflectable diaphragm; a first circuit mounted on the first deflectable diaphragm and being responsive to the first pressure; and a second circuit mounted on the second deflectable diaphragm and being responsive to the second pressure; wherein, the first and second circuits are adapted to be electrically coupled to one another so as to cooperatively provide a common output indicative of a differential pressure associated with the first and second pressures, while simultaneously partially providing an output indicative of the first or second pressures.