| 摘要 |
High performance microlens arrays are fabricated by (i) depositing liquid on the hydrophilic domains of substrates of patterned wettability by either (a) condensing liquid on the domains or (b) withdrawing the substrate from a liquid solution and (ii) optionally curing the liquid to form solid microlenses. The f-number (f#) of formed microlenses is controlled by adjusting liquid viscosity, surface tension, density, and index of refraction, as well as the surface free energies of the hydrophobic and hydrophilic areas. The f-number of formed microlenses is also adjustable by controlling substrate dipping angle and withdrawal speed, the array fill factor and the number of dip coats used. At an optimum withdrawal speed f# is minimized and array uniformity is maximized. At this optimum, arrays of f/3.48 microlenses were fabricated using one dip-coat with uniformity better than &Dgr;f/f˜±3.8% while multiple dip-coats permit production of f/1.38 microlens arrays and uniformity better than &Dgr;f/f˜±5.9%. Average f#s are reproducible to within 3.5%. The method is adaptable and extendible to precision parallel fabrication of (i) microlenses precisely sized, aligned and spatially positioned to various small light sources and optical fiber ends, (ii) conductive bump bonds on substrate pads, and (iii) conductive bonds between corresponding domains on separate perpendicular substrates, all of which are self-aligned. |
