| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter unit of a compact clean room and can be installed easily and supplies a large amount of clean air in a clean room. SOLUTION: In the filter unit of a clean room, an air intake chamber for accommodating a blowing fan and a motor for driving the blowing fan is provided, an air intake port for taking in air is provided at the upper portion of the suction chamber, at the same time the blowing fan and the motor for driving are fixed to a substrate at the bottom of the air suction chamber, a cylindrical filter is provided so that the blowing fan and the motor for driving are surrounded, the lower portion of the cylindrical filter is closed by the substrate, an outer frame is provided so that the cylindrical filter is surrounded, the outer frame closes upper and side parts, releases a lower part, and is connected to an air diffusion member for diffusing air from the ceiling, and purified air from the air diffusion member is supplied into a room.
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