ARRANGEMENT EVALUATING METHOD OF LENS ARRAY

摘要

PROBLEM TO BE SOLVED: To accurately evaluate turbulence of arrangement of a lens array by separately and quantitatively inspecting parallel dislocation and angular dislocation of lens elements. SOLUTION: The parallel light are made incident on the lens array 10 for arranging a large number of lens elements 20 from a first lens surface 10b. The lens transmitted light emitted from a second lens surface 10b is received through a slit. A light receiving quantity is measured while relatively scanning the slit in the lens element arranging direction to the lens array to determine a light receiving quantity change to a slit position as well as to determine a light receiving quantity change to the slit position similarly on the inverse directional lens transmitted light to separately evaluate the parallel dislocation and the angular dislocation of the arranged lens elements by periodic turbulence of the determined light receiving quantity change and comparison of the light receiving quantity change of both.