SPHERICAL SURFACE POLISHING DEVICE AND SPHERICAL SURFACE POLISHING METHOD FOR OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a spherical surface polishing device realizing a spherical center rocking motion having no spherical center displacement when polishing an optical element and allowing the high-precision spherical center polishing of the optical element. SOLUTION: The optical element 1 is pressed to a spherical surface-shaped grinding wheel 3, and an optical element surface is polished by the grinding wheel 3. This spherical surface polishing device is provided with an upper shaft support drive mechanism part journalled to a bearing 91 provided on a device main body 50 rockably around the X axis and having an optical element displacement mechanism holding the optical element 1 to locate the optical element surface at the spherical center position of the grinding wheel 3 and a lower shaft support drive mechanism part journalled to a bearing 63 provided on the device main body 50 rockably around the Y axis perpendicular to the X axis and having a rotating mechanism holding and rotating the grinding wheel 3 and a rocking drive mechanism rocking the grinding wheel around the Y axis to locate the grinding wheel 3 at the spherical center position.