发明名称 METHOD FOR AIR-TIGHTLY SEALING QUARTZ VIBRATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for air-tightly sealing a quartz vibration device where the inside of its package is evacuated and a sputtered metal at air-tight sealing hardly enters the inside of the package. SOLUTION: A metallic cover 3 applies seam welding sealing to a ceramic package 1 in which mount of a quartz vibrating plate is completed in an inactive gas atmosphere. First parallel seam welding is applied from one end in a direction of a long side toward the other end as shown in arrows A, A. The seam wielding does not completely weld the long side direction. Then all parts are welded up to the other end in a direction sown in arrows B, B. Gases in the quartz vibrator are eliminated after that, and spot resistance welding is applied to areas C, C not welded in this state to complete the air-tight sealing.
申请公布号 JP2001274649(A) 申请公布日期 2001.10.05
申请号 JP20000085320 申请日期 2000.03.24
申请人 DAISHINKU CORP 发明人 HARUTA AKIRA;TANIMOTO YASUHIRO
分类号 B23K11/00;H01L23/02;H01L41/09;H03H3/02;(IPC1-7):H03H3/02 主分类号 B23K11/00
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