| 摘要 |
PROBLEM TO BE SOLVED: To obtain a heating device and a method, where a heating means which is split into sub-heaters which are so controlled as not to interfere with each other to accurately heat a substrate. SOLUTION: Three annular heaters are successively and concentrically buried in a substrate mounting pad from inside, and airflow forming means are each provided at sites confronting these heaters. The airflow forming means is formed of two annular pipes tubes (air supply pipe and exhaust pipe) with many air supply vents (exhaust vents) which face vertically downward, and as the air supply pipe and exhaust pipe of the air flow forming means are arranged by sandwiching a site opposed to the heater between them, and a downward air flow formed by the air supply pipe shifts its direction along the surface of the substrate and is drawn toward the exhaust pipe by traversing crosswise above the heater, and in a word, a U-shaped air flow is formed. Therefore, three airflows that can be separately controlled are each formed above the heaters.
|
