发明名称 METHOD AND DEVICE FOR MAPPING SAMPLE PHYSICAL PROPERTY DISTRIBUTION
摘要 PROBLEM TO BE SOLVED: To provide a method and a device for measuring sample physical properties capable of measuring accurate physical properties of a sample on the basis of a probe sample in-plane vibration amplitude. SOLUTION: In this sample physical property measuring method, a probe 3 of a cantilever 2 protruding from a base 1 is abutted to the sample 6, for detecting the torsioal natural vibration amplitude of the cantilever 2, and on the basis of this torsional natural vibration amplitude, the physical properties of the sample 6 are measured.
申请公布号 JP2001289768(A) 申请公布日期 2001.10.19
申请号 JP20000106045 申请日期 2000.04.07
申请人 JAPAN SCIENCE & TECHNOLOGY CORP 发明人 KAWAKATSU HIDEKI
分类号 G01B21/30;G01Q60/24;G01Q60/26;(IPC1-7):G01N13/16 主分类号 G01B21/30
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