| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device which realizes long stroke without increasing the weight of a movable part and attains high control performance and high positioning accuracy. SOLUTION: The device is constituted so that long mirrors 75, 77 are fixed to a part which does not move, the weight of a movable part PST of a stage device is reduced and a relative position of read of an actuator which actuates a stage and a laser interferometer does not change due to stage movement. Since an actuator for stage position control and a laser interferometer read position for stage position measurement are always fixed regardless of a position of a stage, design of a control controller is easy.
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