| 摘要 |
PROBLEM TO BE SOLVED: To provide a mass spectrometer capable of preventing deviation of mass number due to the effect of nonlinear characteristic of a rectification element for detecting a high frequency voltage applied on an electrode. SOLUTION: An auxiliary phase detection part 22 having substantially the same characteristic as a phase detection part 15 is prepared to calculate a voltage corresponding to a nonlinear error amount for a voltage set at the point together with an auxiliary modulator 21 and an auxiliary error amplifier 23. Since this error amount becomes substantially equal to an error in the phase detection part 15, a phase detection output is compensated using the voltage corresponding to the error amount in a compensation computing part 18 to offset the nonlinear error.
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