发明名称 LASER DEVICE MANAGEMENT SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a laser device management system which enables prediction of the life of consumable components and advance prediction of troubles in a laser device by collecting information data showing the state of a laser device for each preset event in a remote place. SOLUTION: A laser control device 10, which controls a laser device 2, obtains state information showing the state of the laser device 2 from the laser device 2 every generation of a preset specified event such as generation of a fixed discharge pulse number and sends it to a monitor terminal 20. The monitor terminal 20 transfers received state information to a server device 30 through a communication line 50. In the server device 30, data base in itself is changed and output information is generated based on transferred state information. The output information is input to a display terminal 40 through the communication line 50 and displayed.
申请公布号 JP2002043219(A) 申请公布日期 2002.02.08
申请号 JP20010126047 申请日期 2001.04.24
申请人 GIGAPHOTON INC 发明人 SAKANISHI SHOICHI;KURIHARA TAKASHI
分类号 G03F7/20;H01L21/027;H01S3/00;H01S5/00;H04B10/155;H04Q9/00;(IPC1-7):H01L21/027 主分类号 G03F7/20
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