INK JET HEAD, ITS MANUFACTURING METHOD, AND IMAGING APPARATUS COMPRISING IT

摘要

PROBLEM TO BE SOLVED: To provide a head in which the number and density of nozzles can be increased in order to meet the requirements of high image quality or high speed recording in an ink jet imaging apparatus, more specifically to provide an ink jet head in which high speed operation is realized by forming active elements on the electrode substrate side and its manufacturing technology. SOLUTION: An electrostatic force is generated between a diaphragm 9 forming the wall face of a pressurized liquid chamber 10 and a counter electrode 8 in order to deform the diaphragm 9 and liquid is ejected by being pressurized with the recovery force of the diaphragm 9. In such an electrostatic ink jet head, active elements constituting a drive circuit 5 are formed on a substrate for forming discrete counter electrodes 8 made of a high melting point metal and its compound.