METHOD FOR GROWING CARBON NANO TUBES SELECTIVELY IN HORIZONTAL DIRECTION FOR APPLICATION TO ELECTRON, SPIN, AND PHOTO ELEMENTS

摘要

PURPOSE: Provided is a method for growing carbon nano tubes selectively and directly in the desired position in the horizontal direction for the application to integrated electron, spin, and photo elements. CONSTITUTION: The method comprises the steps of: forming an insulating film on a substrate at a temperature of 1100deg.C in an electric furnace by an oxidation process or a CVD(chemical vapor deposition) method; forming fine patterns of a catalyst metal layer containing a contact electrode pad on the insulating film by using a catalyst metal such as Ni, Ni/Ti(or Nb), Co, Co/Ti(or Nb), Fe, Fe/Ti(or Nb), and etc.; growing the carbon nano tubes(106) directly among the catalyst patterns under C2H2(or C2H4)/N2(H2, NH3) gas and the gas pressure of 10-500torr for 10-3000sec by a thermal chemical vapor deposition or a plasma process.