| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly rigid sample stage in which a Z stage is constituted only of a nonmagnetic material, and a height of Z stage is low, and the stage is hard to receive an influence of an external disturbing vibration. SOLUTION: This is constituted of a lower plate 1 to which a Z stage is fixed, an elastic hinge (elastic guide means) 3 in which a bottom end part is mounted on a peripheral brim of the lower plate 1 and which is expandable and shrinkable in a direction to go straight to the lower plate 1, an upper plate mounted on an upper end part of an elastic hinge 3 at the peripheral brim and supported via a distance to the lower plate 1, a spring (driving means) 9 to drive the upper plate in a direction to approach the lower plate 1, and an ultrasonic actuator 11 to move the upper plate in a direction to directly go to the lower plate 1.
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