| 摘要 |
PROBLEM TO BE SOLVED: To provide a yield estimation system that considers that relief can be made according to the kinds of fail, and at the same time uses the Monte Carlo method for practically estimating a yield in a semiconductor memory device having a relief circuit for relieving a fail section. SOLUTION: A semiconductor device to be estimated includes a plurality of kinds of wiring 12, 14, and 16, and at least one relief circuit for relieving the fail in the wiring by a method corresponding to the kind of the fail. A plurality of foreign objects 50015 or the like are imaginarily and randomly thrown down, and the ratio of the foreign objects for causing fail in wiring out of foreign objects is calculated for each kind of the fail. The yield is calculated for each kind of fail by the number of the foreign objects of the manufacturing line of the semiconductor device obtained in advance, and the ratio for obtaining the product of yields for each kind of fail, thus calculating the yield of the semiconductor device.
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