| 摘要 |
PROBLEM TO BE SOLVED: To facilitate exchange or repair of a contact probe unit. SOLUTION: A conductive needle-like body 3 and a coil spring 4 are provided in a holder hole 2 made in a support body 1, a pin 9 is protruded from a circuit board 5 having a terminal 5a in contact with the coil spring 4, the support body 1 is held in a displaceable manner by a through-hole 10 made in the support body and the pin, and the conductive needle-like body is brought into contact with an electrode 6a of a wafer 6 for inspection. Both members can be positioned without being integrated with each other by adhesive or the like, and can be easily separated during the maintenance, and a conductive contact can be easily exchanged, and a plate-like body can be easily repaired.
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