| 摘要 |
PURPOSE: A pneumatic cylinder apparatus for semiconductor equipment is provided to correct an increase or decrease speed of a cylinder rod of a pneumatic cylinder within a short period of time based upon measurement and a measurement result, by using a physical method instead of an empirical method. CONSTITUTION: A piston is installed inside a cylinder body. The first and second input/output ports(118,119) are formed in the cylinder body corresponding to both sides of the piston with respect to the cylinder rod(122) connected to the piston and the piston. The pneumatic cylinder is composed of the cylinder body, the piston and the first and second input/output ports. One end of the first connecting pipe(181) is connected to the first input/output port, and the other end of the second connecting pipe(182) is connected to the first air supply unit. One end of the second connecting pipe is connected to the second input/output port, and the other end of the second connecting pipe is connected to the second air supply unit. A three-directional valve(150) is connected to a part of the first and second connecting pipes. The air exhausted from the first and second pipes is exhausted to the outside and the air supplied from the first and second air supply units is induced to the first and second input/output ports, by using the three-directional valve. A flow rate measuring unit is installed in the rest of the ports of the three-directional valve.
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