THIN FILM TRANSISTOR HAVING SELF-ALIGNED TRANSPARENT PIXEL ELECTRODE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A pixel cell and a method for manufacturing the same are provided to simplify manufacturing processes by self-aligning a transparent pixel electrode to a thin film transistor. CONSTITUTION: A thin film transistor structure is formed on a substrate. A data metal(20) is formed to connect with the thin film transistor structure. A first transparent conductive layer(22) is patterned to connect with the data metal(20). A dielectric film(26) is then formed on the resultant structure. A via hole is formed to expose portions of the first transparent conductive layer(22) by selectively etching the dielectric film(26). A second transparent conductive layer(30) is deposited on the dielectric film(26) and in the via hole to connect with the first transparent conductive layer(22) by self-aligning. A pixel electrode is then formed by patterning the second transparent conductive layer(30).