发明名称 Method and device for polishing work edge
摘要 Method and device for polishing an edge of a work is disclosed, wherein a rubber wheel 6 containing abrasives is rotated in a plane normal to a surface of a work 5 in a form of a thin plate having an edge 5a to be polished. A spindle portion 8 holding the rubber wheel such that the rubber wheel is driven to rotate in a plane normal to the surface of the work. A mount portion 4 for mounting the work 5 thereon such that the work 5 is movable straight with respect to the rubber wheel 6 in a plane normal to the plane in which the rubber wheel 6 is rotated. Elastic means 9 is provided to urge the spindle portion 8 and the work mounting portion 4 in a direction so as to bring the rubber wheel 6 and the edge 5a of the work 5 in contact with each other, wherein one of the spindle portion 8 and the mount portion 4 is movable toward and away from the other during polishing operation.
申请公布号 US6410438(B1) 申请公布日期 2002.06.25
申请号 US20000691946 申请日期 2000.10.20
申请人 EMUTECH CO., LTD. 发明人 OZAKI HARUO
分类号 B24B9/00;B24B9/06;B24B41/00;(IPC1-7):H01L21/302 主分类号 B24B9/00
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