发明名称 PB substituted perovskites for thin films dielectrics
摘要 The invention described is a method of forming an improved dielectric material by adding lead to an original perovskite material having an original critical grain size to form a lead enhanced perovskite material, then forming a layer of the lead enhanced perovskite material having an average grain size less than the original critical grain size whereby the dielectric constant of the layer is substantially greater than the dielectric constant of the original perovskite material with an average grain size similar to the average grain size of the layer. The critical grain size, as used herein, means the largest grain size such that the dielectric constant starts to rapidly decrease with decreasing grain sizes. Preferably, the lead enhanced perovskite material is further doped with one or more acceptor dopants whereby the resistivity is substantially increased and/or the loss tangent is substantially decreased. Preferably, the original perovskite material has a chemical composition ABO3, where A is one or more monovalent, divalent or trivalent elements, and B is one or more pentavalent, tetravalent, trivalent or divalent elements.
申请公布号 US6432473(B1) 申请公布日期 2002.08.13
申请号 US19950458999 申请日期 1995.06.01
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 SUMMERFELT SCOTT R.;BERATAN HOWARD R.;KULWICKI BERNARD M.
分类号 H01B3/12;H01G4/12;H01L21/316;H01L21/822;H01L21/8242;H01L27/04;H01L27/10;H01L27/108;H01L27/115;(IPC1-7):B05D5/12 主分类号 H01B3/12
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