VERTICAL OVEN AND METHOD OF PROCESSING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To enable a wafer as a processing object introduced in a vertical oven to be improved in the uniformity of a time integral value of temperature through its surface. SOLUTION: A boat loaded with wafers is introduced into a cylindrical oven, and the boat is so positioned as to make its rotation axis located away from the center axis of the cylindrical oven by a certain distance larger than the radius of the wafer and is rotated. The boat is not only rotated but is also revolved. Furthermore, the boat is moved vertically during processing.