CHEMICAL SUPPLY APPARATUS FOR SEMICONDUCTOR FABRICATION PROCESS

摘要

PURPOSE: A chemical supply apparatus for semiconductor fabrication process is provided to maintain temperature of chemicals stored in a bowl and detect accurately the amount of chemicals. CONSTITUTION: A plurality of light sources(401) is installed in a water bath(105). Optical signals generated from the light sources(401) are parallel to each other. The optical signals generated from the light sources(401) transmits a bowl(103). A plurality of optical sensors(403) are used for detecting the optical signals. The plural light sources(401) corresponds to the plural optical sensors(403). The plural optical sensors(403) generate predetermined signals to a water level detection portion(404) according to the optical signals in order to report a state of phosphorous oxychloride. A center control unit(107) receives the detected results of the optical sensors(403) from the water level detection portion(404), drives an alarm portion(113) or a display panel(405), and controls an interlock drive portion(407).