发明名称 |
Semiconductor wafer carrier, semiconductor wafer carrier automatic transfer system and method for producing a semiconductor device |
摘要 |
A semiconductor wafer carrier 1 measures a transferring speed of a semiconductor wafer carrier transfer system; a result of measured speed is compared with a threshold value to obtain a result of comparison, and the result of comparison is transmitted to a semiconductor wafer carrier automatic transferring device 8 to adjust an operational parameter, whereby all constructive device elements of the semiconductor wafer carrier automatic transferring system can be automatically adjusted and a time for setting-up can be shortened as well as saving man power.
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申请公布号 |
US6449530(B1) |
申请公布日期 |
2002.09.10 |
申请号 |
US20000704747 |
申请日期 |
2000.11.03 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
YAMADA YOSHIAKI;ONO AKIRA |
分类号 |
B65G49/00;B65G49/07;H01L21/00;H01L21/673;H01L21/677;(IPC1-7):G06F7/00 |
主分类号 |
B65G49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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