发明名称 BI-DIRECTIONAL VALVE FOR PREVENTING LEAK IN SEMICONDUCTOR PRODUCTION DEVICE
摘要 PURPOSE: A bi-directional valve for preventing leak is provided to separate a long valve to two parts. CONSTITUTION: A bi-directional valve for preventing leak comprises a first and a second chamber holes(100,102), a first and a second slit door pads(104,106) for closing or opening the first and second chamber holes(100,102) and a first and a second cylinders(108,110) for moving the first and second slit door pads(104,106) up/down. The bi-directional valve further includes an up-sensor(120) and a down-sensor(124) for detecting the up/down motion on the first cylinder(108), up/down air ports(112,116) for supplying an up/down air on the first cylinder(108), another up-sensor(122) and another down-sensor(126) and another up/down air ports(114,118) on the second cylinder(110).
申请公布号 KR20020072333(A) 申请公布日期 2002.09.14
申请号 KR20010012129 申请日期 2001.03.09
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SEO, HYEON UK
分类号 H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/00
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